OTF-1200X-80-DVD is a 1200ºC and OD 80 mm tube furnace with an air-tight automatic sliding mechanism inside the crucible, which can move to the desired temperature position under the controlled atmosphere as sublimating source to achieve DVD or PVD f
OTF-1200X-80-DVD is a 1200ºC and OD 80 mm tube furnace with an air-tight automatic sliding mechanism inside the crucible, which can move to the desired temperature position under the controlled atmosphere as sublimating source to achieve DVD or PVD for the substrate in the center of the furnace.
SPECIFICATIONS:
Furnace Feature
One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition.
One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
30 segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace
One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.
Furnace Power
110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when placing order )
1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone
Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C
You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller
PID automatic control via solid-state relay with 30 steps programmable
Built-in Over Temperature and Thermocouple Failure Protection
Optional: The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost.
Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
One small quartz boat is included for placing samples or evaporation materials.
Click here to choose other size crucibles
Vacuum Flanges
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum portclick picture below to see details )
Vacuum Level
10-2torr (by mechanical pump)
Fitting Ports & Optional Parts
You may need a vacuum valve at the end of the vacuum port ( click picture left to order )